Ṣiṣeto Laser Femtosecond fun Itọju-mikiro-lilu agbegbe ti Ooru ti o kan Zero
1. Awọn ipilẹ ati Awọn anfani
Awọn lasers Femtosecond (iwọn pulse 10-15s) jẹ ki gbigba aiṣedeede ṣiṣẹ nipasẹ:
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Iyọnu fọto pupọ (MPI)
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ionization Avalanche (AI)
Awọn anfani pataki: -
Sunmọ-odo HAZ
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Ipese-kere-kere (min. 1μm ihò)
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Dara fun awọn ohun elo ti o ṣe afihan / sihin
2. Zero-HAZ Mechanisms
2.1 Agbara Gbigbe Iṣakoso
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Electron-latice nonequilibrium
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Alakoso bugbamu alakoso
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Pilasima idabobo bomole
2.2 Awọn awoṣe Yiyọ Ohun elo
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bugbamu Coulomb
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Ti kii-gbona mnu fifọ
3. Lominu ni ilana paramita
Paramita | Ibiti o | Ilana |
---|---|---|
Igi gigun | 343-1030nm | Imudara gbigba |
Agbara polusi | 0.1-50μJ | Iṣakoso ala ablation |
Iwọn atunwi | 10kHz-10MHz | Iyara ikojọpọ ooru |
Idojukọ | NAA> 0.7 | Idinku iwọn iranran |
Ṣiṣayẹwo | Ajija ona | Idinku Layer Recast |
4. Ohun elo igba
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Awọn microvias PCB igbohunsafẹfẹ giga:
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20-50μm opin
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10:1 ipin ipin
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Ra
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Liluho TSV gilasi:
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Crack / taper-free
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100 iho / iṣẹju-aaya
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Ṣiṣẹda iyika ti o rọ:
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Awọn sobusitireti PI ti ko ni erogba
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5μm min. ila ila
5. Awọn italaya & Awọn ojutu
Ipenija 1: Aisedeede ohun elo ti o ṣe afihan
Solusan: Gigun igbi ti a le tun ṣe (343+515nm)
Ipenija 2: Kekere jin-iho ṣiṣe
Solusan: Bessel tan ina mura
Ipenija 3: Aitasera iṣelọpọ pupọ
Solusan: Abojuto pilasima akoko gidi + iṣakoso adaṣe
6. Awọn ọna abuda
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Micro-CT: 3D mofoloji
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Raman spectroscopy: Ayẹwo alakoso
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TEM: Iduroṣinṣin Lattice
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Idanwo ihuwasi: Didara odi