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Likarolo tsa Litaba

Femtosecond Laser Processing for Zero Heat-Affected Zone Micro-Drilling

2025-04-14

Micro-Drilling.jpg

1. Metheo le Melemo

Li-laser tsa Femtosecond (10-15s pulse wide) li thusa ho monya ka tsela e sa tloaelehang ka:

  • Multi-photon ionization (MPI)

  • Avalanche ionization (AI)
    Melemo ea bohlokoa:

  • Haufi le zero HAZ

  • Ho nepahala ha sub-micron (min. 1μm masoba)

  • E loketse lisebelisoa tse bonahatsang / tse pepeneneng

2. Mekhoa ea Zero-HAZ

2.1 Taolo ea Phetisetso ea Matla

  • Electron-lattice nonequilibrium

  • Bolaoli ba ho phatloha ha mokhahlelo

  • Khatello ea tšireletso ea plasma

2.2 Mehlala ea ho Tlosa Lintho

  • Ho phatloha ha Coulomb

  • Ho senya tlamo e sa chesehang

3. Mekhoa e Bohlokoa ea Ts'ebetso

Paramethara Range Mokhoa
Wavelength 343-1030nm Ntlafatso ea ho monya
Pulse energy 0.1-50μJ Taolo ea moeli oa ablation
Sekhahla sa ho pheta-pheta 10kHz-10MHz Ho qoba ho bokella mocheso
Tsepamisa maikutlo NA>0.7 Phokotso ea boholo ba letheba
Ho hlahloba Tsela ea spiral Phokotso ea lera hape

4. Linyeoe tsa Kopo

  1. Li-microvia tsa PCB tsa maqhubu a phahameng:

  • 20-50μm bophara

  • 10:1 tšobotsi ea karolelano

  • Ra

  1. Ho cheka ha khalase ea TSV:

  • E se nang leqhoko (//)

  • 100 masoba ka motsotsoana

  1. Flexible circuit process:

  • Li-substrates tsa PI tse se nang carbonization

  • 5μm mets. linewidth

5. Mathata & Tharollo

Bothata ba 1: Ho hloka botsitso ha lintho tse bonahalang
Tharollo: Tunable wavelength (343+515nm)

Phephetso ea 2: Bokhoni bo tlase ba sekoti
Tharollo: Sebopeho sa Bessel

Phephetso ea 3: Ho lumellana ha tlhahiso e ngata
Tharollo: Tlhokomelo ea nako ea 'nete ea plasma + taolo e ikamahanyang le maemo

6. Mekhoa ea Boitšoaro

  • Micro-CT: 3D morphology

  • Raman spectroscopy: Tlhahlobo ea mohato

  • TEM: Botšepehi ba Lattice

  • Teko ea conductivity: Boleng ba lebota