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Femtosecond Laser Processing mo Zero Heat-Affected Zone Micro-Drilling

2025-04-14

Micro-Drilling.jpg

1. Fa'avae ma Fa'amanuiaga

Femtosecond lasers (10-15s pulse width) e mafai ai ona fa'aoga le laina e ala i:

  • Fa'atosina tele-photon (MPI)

  • Avalanche ionization (AI)
    Fa'amanuiaga autu:

  • Laititi-leo HAZ

  • Fa'ato'a sa'o lelei (min. 1μm pu)

  • Talafeagai mo mea e atagia/malamalama

2. Ole-HAZ Mechanisms

2.1 Pulea Fa'aliliuga Malosiaga

  • Electron-lattice le tutusa

  • Puleaina o le pa

  • Taofi le puipuiga o le plasma

2.2 Fa'ata'ita'iga Aveesea Mea

  • Pa o Coulomb

  • motusia noataga e le'o vevela

3. Fa'ata'ita'iga Fa'atonuga Fa'atino

Parameter Avanoa Fa'ainisinia
Umi ole galu 343-1030nm Fa'aleleia o le miti
Malosi o le fatu 0.1-50μJ Fa'atonu le fa'amalo
Fuafuaga fai fai 10kHz-10MHz Aloese mai le faaputuputuina o le vevela
Taulai atu NA>0.7 Fa'aitiitia le tele o le nofoaga
Va'aiga Ala taamilo Toe fa'aitiitiga fa'aitiitiga

4. Mataupu Fa'atatau

  1. Microvias PCB maualuga:

  • 20-50μm lautele

  • 10:1 fua fa'atatau

  • Ra

  1. vili tioata TSV:

  • Ta'eta'e/e leai se taper

  • 100 pu/sec

  1. Fa'agasologa fa'agasologa fe'avea'i:

  • Su'ega PI e leai se carbonization

  • 5μm min. laina lautele

5. Lu'i & Fofo

Lu'i 1: Fa'aleaogaina meafaitino le mautu
Fofo: Fa'alogoga umi (343+515nm)

Lu'i 2: E maualalo le lelei o le pu loloto
Fofo: Bessel fa'ameamea

Lu'i 3: Fa'atosina gaosiga tele
Fofo: Mataʻituina taimi tonu o le plasma + faʻatonutonu faʻafetaui

6. Metotia Fa'ailoga

  • Micro-CT: 3D morphology

  • Raman spectroscopy: Iloiloga vaega

  • TEM: Lattice fa'amaoni

  • Fa'ata'ita'iga fa'ata'ita'iga: Uiga puipui