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Hana ʻia ʻo Femtosecond Laser no Zero Heat-Affected Zone Micro-Drilling

2025-04-14

Micro-Drilling.jpg

1. Nā kumu a me nā pono

Hiki i nā lasers Femtosecond (10-15s pulse laula) ke hoʻohana ʻole ʻia ma o:

  • Ka hoʻokaʻawale ʻana i nā kiʻi he nui (MPI)

  • ʻO ka hoʻoheheʻe ʻia ʻana o ka wailele (AI)
    Nā pōmaikaʻi nui:

  • Kokoke-ʻole HAZ

  • Ka pololei sub-micron (min. 1μm puka)

  • He kūpono no nā mea hoʻomanaʻo

2. Mechanism Zero-HAZ

2.1 Mana Hoʻololi Ike

  • Electron-lattice nonequilibrium

  • Manao pahū pae

  • Hoʻopaʻa pale plasma

2.2 Nā mea hoʻohālike e wehe ai

  • Pahū Coulomb

  • ʻO ka uhaki ʻana i ka paʻa wela ʻole

3. Nā ʻāpana Kaʻina Hana Koʻikoʻi

ʻĀpana Laulā Mechanism
Loʻihi nalu 343-1030nm Hoʻonui i ka absorption
Puke puʻupuʻu 0.1-50μJ Ka hoʻomalu ʻana i ka paepae
Laki hana hou 10kHz-10MHz Hōʻalo i ka hōʻiliʻili ʻana i ka wela
Ka nānā 'ana NA>0.7 Hoemi nui kiko
Ka nānā ʻana Ala wili Hoʻoemi hou i ka papa

4. Na hihia noi

  1. Nā microvia PCB kiʻekiʻe:

  • 20-50μm anawaena

  • 10:1 hiʻona lākiō

  • Ra

  1. ʻO ka wili aniani TSV:

  • ʻAʻohe māwae

  • 100 puka/sec

  1. Ka hana kaapuni hikiwawe:

  • Nā pani PI ʻole carbonization

  • 5μm min. laina laina

5. Nā pilikia a me nā hoʻonā

Paʻa 1: ʻAʻole paʻa nā mea noʻonoʻo
Pane: Ka lōʻihi hawewe kani (343+515nm)

Luʻi 2: Haʻahaʻa haʻahaʻa hohonu-puka pono
Pane: Ka hoʻopololei ʻana i ke kukui Bessel

Luʻi 3: ʻO ka hana paʻa ʻana
Pane: Ka nānā ʻana i ka plasma manawa maoli + ka mana adaptive

6. Ke ano o ke ano

  • Micro-CT: 3D morphology

  • Raman spectroscopy: Hōʻuluʻulu manaʻo

  • TEM: Lattice integrity

  • ʻO ka hoʻāʻo conductivity: Wall quality